赤外線センサ原理と技術

【著者紹介】

【目次】

第１章　はじめに

第２章　赤外線検出器の分類と非冷却IRFPA開発の推移

1. ２-１　赤外線検出器の分類
2. ２-２　非冷却IRFPA開発の推移

第３章　非冷却IRFPAの基礎

1. ３-１　熱型赤外線検出器の動作
2. ３-２　非冷却IRFPAの構成と動作
3. ３-３　赤外線イメージング
4. ３-４　IRFPAの性能指標
5. ３-５　非冷却IRFPAの設計
   1. ３-５-１　感度決定要因
   2. ３-５-２　温度センサ
   3. ３-５-３　熱設計
   4. ３-５-４　赤外線吸収
6. ３-６　理論限界
   1. ３-６-１　画素ピッチ
   2. ３-６-２　NETD

第４章　強誘電体IRFPA

1. ４-１　強誘電体赤外線検出器の動作
2. ４-２　ハイブリッド強誘電体IRFPA
3. ４-３　薄膜強誘電体モノリシックIRFPA

第５章　抵抗ボロメータIRFPA

1. ５-１　抵抗ボロメータ赤外線検出器の動作
2. ５-２　VOxマイクロボロメータIRFPA
3. ５-３　その他の材料を用いた抵抗ボロメータIRFPA
4. ５-４　抵抗ボロメータIRFPAの画素ピッチ縮小と高解像度化
5. ５-５　中赤外線領域に感度を持った非冷却IRFPA

第６章　熱電IRFPA

1. ６-１　熱電赤外線検出器の動作
2. ６-２　サーモパイルIRFPA

第７章　ダイオードIRFPA

1. ７-１　ダイオード赤外線検出器の動作
2. ７-２　SiダイオードIRFPA

第８章　バイマテリアルとサーモオプティカルIRFPA

第９章　非冷却IRFPAの真空パッケージング技術

1. ９-１　真空パッケージングの必要性
2. ９-２　初期の真空パッケージング技術
3. ９-３　低コスト化への取り組み
   1. ９-３-１　ウエハレベル真空パッケージング
   2. ９-３-２　チップレベル真空パッケージング
   3. ９-３-３　バッチ処理真空パッケージング
   4. ９-３-４　ピクセルレベル真空パッケージング
4. ９-４　マイクロ真空計

第10章　非冷却赤外線カメラと応用

1. 10-１　非冷却赤外線カメラの構成と特徴
   1. 10-１-１　全体構成
   2. 10-１-２　光学系
   3. 10-１-３　補正
   4. 10-１-４　温度校正
2. 10-２　暗視応用
3. 10-３　温度計測応用
4. 10-４　その他の応用

第11章　むすび

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